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Getting Production Costs down for High-Performance Microsystems

LOTUS Systems’ modular Gemenex system
The new wet bench for anisotropic Silicon etching is part of LOTUS Systems’ modular Gemenex system. © LOTUS Systems GmbH 2007
  With the new leading-edge technology of its Gemenex Wet Bench series LOTUS Systems launches an innovative concept for anisotropic Silicon etching for cost-efficient high-volume production of high-performance microsystems.
The wet etch module was developed in close co-operation with renowned research institutes and leading manufacturers of microsystems. Its key features are:
  • Best-in-class etch homogeneity
  • Excellent process repeatability
  • Simple handling and usability
  • Unbeatably low cost-of-ownership
Due to the unique concept of its Gemenex series, the specialist for Wet Processing, Chemical Management, and Parts Cleaning equipment can offer the new system in manual mode for Research and Development as well as in fully automatic configurations for high wafer throughput in production environments.
For further information please visit LOTUS Systems at Hanover Fair from April 16th to 20th, 2007, Hall 15 – Booth D34/44 or contact:

  • LOTUS Systems GmbH
    In der Au 6, 78187 Gutmadingen, GERMANY
    Contact: Andreas Dietrich
    Phone: +49 7704 9233-30
    Fax: +49 7704 9233-60
  • innveo consulting
    Tuulimyllyntie 6B20, 00920 Helsinki, FINLAND
    Kontakt: Johannes Frech
    Phone: +358 50 339 55 99
    Mobile: +49 171 830 35 00

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